Recommended reading list of early publications on atomic layer deposition - Outcome of the "Virtual Project on the History of ALD"

E Ahvenniemi, AR Akbashev, S Ali, M Bechelany, M Berdova, S Boyadjiev, DC Cameron, R Chen, M Chubarov, V Cremers, A Devi, V Drozd, L Elnikova, G Gottardi, K Grigoras, DM Hausmann, CS Hwang, SH Jen, T Kallio, Jaana KanervoI Khmelnitskiy, DH Kim, L Klibanov, Y Koshtyal, Krause AOI, J Kuhs, I Karkkanen, ML Kaariainen, T Kaariainen, L Lamagna, AA Lapicki, M Leskela, H Lipsanen, J Lyytinen, A Malkov, A Malygin, A Mennad, C Militzer, J Molarius, M Norek, C Ozgit-Akgun, M Panov, H Pedersen, F Piallat, G Popov, RL Puurunen, G Rampelberg, Ras RHA, E Rauwel, F Roozeboom, T Sajavaara, H Salami, H Savin, N Schneider, TE Seidel, J Sundqvist, DB Suyatin, T Torndahl, van Ommen JR, C Wiemer, Ylivaara OME, O Yurkevich, O Yurkevich, Ylivaara OME

    Research output: Contribution to journalReview Article or Literature Reviewpeer-review

    36 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)
    Number of pages13
    JournalJournal of Vacuum Science and Technology A
    Volume35
    Issue number1
    DOIs
    Publication statusPublished - 2017
    MoE publication typeA2 Review article in a scientific journal

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