Intercomparison of scanning probe microscopes

R Breil; T Fries; J Garnaes; J Haycocks; D Huser; J Joergensen; W Kautek; L Koenders; N Kofod; KR Koops; R Korntner; B Lindner; W Mirande; A Neubauer; J Peltonen; GB Picotto; M Pisani; H Rothe; M Sahre; M Stedman; G Wilkening

Intercomparison of scanning probe microscopes

R Breil, T Fries, J Garnaes, J Haycocks, D Huser, J Joergensen, W Kautek, L Koenders, N Kofod, KR Koops, R Korntner, B Lindner, W Mirande, A Neubauer, J Peltonen, GB Picotto, M Pisani, H Rothe, M Sahre, M StedmanG Wilkening

Research output: Contribution to journal › Article › Scientific › peer-review

26 Citations (Scopus)

Original language	English
Pages (from-to)	296-305
Journal	Precision Engineering
Volume	26
Issue number	3
Publication status	Published - Jul 2002
MoE publication type	A1 Journal article-refereed

Keywords

scanning probe microscopy
quantitative microscopy
calibration
comparison measurements
calibration artifacts

Cite this

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title = "Intercomparison of scanning probe microscopes",

keywords = "scanning probe microscopy, quantitative microscopy, calibration, comparison measurements, calibration artifacts",

author = "R Breil and T Fries and J Garnaes and J Haycocks and D Huser and J Joergensen and W Kautek and L Koenders and N Kofod and KR Koops and R Korntner and B Lindner and W Mirande and A Neubauer and J Peltonen and GB Picotto and M Pisani and H Rothe and M Sahre and M Stedman and G Wilkening",

year = "2002",

month = jul,

language = "English",

volume = "26",

pages = "296--305",

journal = "Precision Engineering",

issn = "0141-6359",

publisher = "Elsevier",

number = "3",

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TY - JOUR

T1 - Intercomparison of scanning probe microscopes

AU - Breil, R

AU - Fries, T

AU - Garnaes, J

AU - Haycocks, J

AU - Huser, D

AU - Joergensen, J

AU - Kautek, W

AU - Koenders, L

AU - Kofod, N

AU - Koops, KR

AU - Korntner, R

AU - Lindner, B

AU - Mirande, W

AU - Neubauer, A

AU - Peltonen, J

AU - Picotto, GB

AU - Pisani, M

AU - Rothe, H

AU - Sahre, M

AU - Stedman, M

AU - Wilkening, G

PY - 2002/7

Y1 - 2002/7

KW - scanning probe microscopy

KW - quantitative microscopy

KW - calibration

KW - comparison measurements

KW - calibration artifacts

M3 - Article

SN - 0141-6359

VL - 26

SP - 296

EP - 305

JO - Precision Engineering

JF - Precision Engineering

IS - 3

ER -