Intercomparison of scanning probe microscopes

R Breil, T Fries, J Garnaes, J Haycocks, D Huser, J Joergensen, W Kautek, L Koenders, N Kofod, KR Koops, R Korntner, B Lindner, W Mirande, A Neubauer, J Peltonen, GB Picotto, M Pisani, H Rothe, M Sahre, M StedmanG Wilkening

Research output: Contribution to journalArticleScientificpeer-review

25 Citations (Scopus)
Original languageEnglish
Pages (from-to)296-305
JournalPrecision Engineering
Volume26
Issue number3
Publication statusPublished - Jul 2002
MoE publication typeA1 Journal article-refereed

Keywords

  • scanning probe microscopy
  • quantitative microscopy
  • calibration
  • comparison measurements
  • calibration artifacts

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