Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test

Ville Rontu, Anton Nolvi, Ari Hokkanen, Edward Haeggström, Ivan Kassamakov. Sami Franssila

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)
Number of pages10
JournalMaterials Research Express
Volume5
DOIs
Publication statusPublished - 2018
MoE publication typeA1 Journal article-refereed

Keywords

  • bulge testing
  • fracture strength
  • Atomic layer deposition

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