Artifact for determining resolution of imaging based on electromagnetic radiation and/or mechanical waves

Niklas Sandler (Inventor), Johan Nyman (Inventor)

Research output: Patent

Abstract

An artifact for determining resolution of imaging based on electromagnetic radiation, mechanical waves, or both is presented. The artifact includes a substrate and layers on top of the substrate. The layers include organic material and are stacked on each other in a partially overlapping way so that an edge of a first one of the layers is arranged to intersect with an edge of a second one of the layers. The layers constitute a three-dimensional surface topography where a groove defined by the edges of the first and second ones of the layers is tapering towards a point of intersection between the edges. The resolution is a minimum width of the tapering groove which is revealed by the imaging so that a pre-determined criterion is fulfilled.
Original languageEnglish
Publication statusPublished - 2020
MoE publication typeH1 Granted patent

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