A2 Review article, Literature review, Systematic reviewRecommended reading list of early publications on atomic layer deposition - Outcome of the "Virtual Project on the History of ALD" (2017) Ahvenniemi E, Akbashev AR, Ali S, Bechelany M, Berdova M, Boyadjiev S, Cameron DC, Chen R, Chubarov M, Cremers V, Devi A, Drozd V, Elnikova L, Gottardi G, Grigoras K, Hausmann DM, Hwang CS, Jen SH, Kallio T, Kanervo J, Khmelnitskiy I, Kim DH, Klibanov L, Koshtyal Y, Krause AOI, Kuhs J, Karkkanen I, Kaariainen ML, Kaariainen T, Lamagna L, Lapicki AA, Leskela M, Lipsanen H, Lyytinen J, Malkov A, Malygin A, Mennad A, Militzer C, Molarius J, Norek M, Ozgit-Akgun C, Panov M, Pedersen H, Piallat F, Popov G, Puurunen RL, Rampelberg G, Ras RHA, Rauwel E, Roozeboom F, Sajavaara T, Salami H, Savin H, Schneider N, Seidel TE, Sundqvist J, Suyatin DB, Torndahl T, van Ommen JR, Wiemer C, Ylivaara OME, Yurkevich O, Yurkevich O, Ylivaara OMEJournal of Vacuum Science and Technology A |
View on publisher's site |