Peer-reviewed publications

A2 Review article, Literature review, Systematic review
Recommended reading list of early publications on atomic layer deposition - Outcome of the "Virtual Project on the History of ALD" (2017)
Ahvenniemi E, Akbashev AR, Ali S, Bechelany M, Berdova M, Boyadjiev S, Cameron DC, Chen R, Chubarov M, Cremers V, Devi A, Drozd V, Elnikova L, Gottardi G, Grigoras K, Hausmann DM, Hwang CS, Jen SH, Kallio T, Kanervo J, Khmelnitskiy I, Kim DH, Klibanov L, Koshtyal Y, Krause AOI, Kuhs J, Karkkanen I, Kaariainen ML, Kaariainen T, Lamagna L, Lapicki AA, Leskela M, Lipsanen H, Lyytinen J, Malkov A, Malygin A, Mennad A, Militzer C, Molarius J, Norek M, Ozgit-Akgun C, Panov M, Pedersen H, Piallat F, Popov G, Puurunen RL, Rampelberg G, Ras RHA, Rauwel E, Roozeboom F, Sajavaara T, Salami H, Savin H, Schneider N, Seidel TE, Sundqvist J, Suyatin DB, Torndahl T, van Ommen JR, Wiemer C, Ylivaara OME, Yurkevich O, Yurkevich O, Ylivaara OME
Journal of Vacuum Science and Technology A
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Last updated on 2019-01-01 at 08:10